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Nanofabrication through molding

发布时间:2022-05-11  点击次数:
发表刊物:Progress in Materials Science
关键字:Nanomolding; Nanofabrication; Diffusion; Dislocation slip; Single crystal; Viscous flow
摘要:Nanomolding usually refers to a top-down fabrication method by which a formable or moldable material is shaped using a mold of nanoscale dimensions. Nanomolding is the underlying mechanism for a wide range of nanofabrication methods including template-based deposition, extrusion, nanoembossing, soft lithography, nanoimprint lithography, thermomechanical nanomolding, and nanoimprinting. Its suitability for nanofabrication in a wide range of materials and states of matter makes it one of the most versatile nanofabrication methods. It offers solutions for the fabrication of a wide range of nanoma
论文类型:期刊论文
文献类型:J
卷号:125
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发表时间:2022-04-01
收录刊物:SCI

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